Application

Semiconductor

Energy-efficient screw air compressors and complete compressed air systems for Semiconductor applications.

Semiconductor fabs use compressed air for wafer handling, equipment actuation and cleanroom processes demanding extreme purity.

Compressed Air Applications in Semiconductor

  • Wafer handler and robot actuation
  • Air bearings and vacuum systems
  • Cleanroom tool operation
  • Chip test equipment

Air Quality and Sizing Requirements

Fabs require the strictest particle, oil and moisture limits, with redundant systems and precise pressure control.

Tell us your production scale and air demand, and our engineers will size a complete compressed air system for your plant.

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